MEMS Technology
MEMS (Micro Electrical Mechanical System) refers to compact electro mechanical instruments developed based on semiconductor process technology, or devices with integrated electronic circuits like the acceleration and pressure sensors used in cars.
SII has been developing MEMS for decades, including the cantilevers that are used in our scanning probe microscope (SPM). A high-performance cantilever and a wide range of MEMS instruments are currently being developed, taking advantage of CAD for MEMS and structural analysis tools.
